Deposition and characterization of multi-functional, complex thin films using 
atomic layer deposition for copper corrosion protection

Dogan, G.

doi:10.18419/opus-12286

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Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection

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Dogan, G.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart;

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http://dx.doi.org/10.18419/opus-12286
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Dogan, G. (2022). Deposition and characterization of multi-functional, complex thin films using atomic layer deposition for copper corrosion protection. PhD Thesis, Universität Stuttgart, Stuttgart.

Cite as: https://hdl.handle.net/21.11116/0000-000B-74E0-5

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