Mode tuning of photonic crystal nanocavities by photoinduced non-thermal 
oxidation

Intonti, F.; Caselli, N.; Vignolini, Silvia; Riboli, F.; Kumar, S.; Rastelli, A.; Schmidt, O. G.; Francardi, M.; Gerardino, A.; Balet, L.; Li, L. H.; Fiore, A.; Gurioli, M.

doi:10.1063/1.3678036

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Mode tuning of photonic crystal nanocavities by photoinduced non-thermal oxidation

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Citation

Intonti, F., Caselli, N., Vignolini, S., Riboli, F., Kumar, S., Rastelli, A., et al. (2012). Mode tuning of photonic crystal nanocavities by photoinduced non-thermal oxidation. Applied Physics Letters, 100(3): 033116. doi:10.1063/1.3678036.

Cite as: https://hdl.handle.net/21.11116/0000-000B-FA62-D

Abstract

A method to achieve photoinduced tuning of PhC nanocavity modes is discussed and implemented. It is based on light induced oxidation in air atmosphere with very low thermal budget which produces a local reduction of the GaAs membrane effective thickness and a large blueshift of the nanocavity modes. It is also shown that green light is much more efficient in inducing the micro-oxidation with respect to near infrared light. The observed behaviour is attributed to oxide growth promoted by photoenhanced reactivity. © 2012 American Institute of Physics.