Calibration of Deformable Mirrors for Open-Loop Control

Leutenegger, M.; Hell, Stefan W.

doi:10.3390/s22218465

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Calibration of Deformable Mirrors for Open-Loop Control

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Leutenegger, M.
Department of NanoBiophotonics, Max Planck Institute for Multidisciplinary Sciences, Max Planck Society;

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Hell, Stefan W.
Department of NanoBiophotonics, Max Planck Institute for Multidisciplinary Sciences, Max Planck Society;

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Citation

Leutenegger, M., & Hell, S. W. (2022). Calibration of Deformable Mirrors for Open-Loop Control. Sensors, 22(21): 8465. doi:10.3390/s22218465.

Cite as: https://hdl.handle.net/21.11116/0000-000C-4699-9

Abstract

Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.