Microcantilever-integrated photonic circuits for broadband laser beam scanning

Sharif Azadeh, Saeed; Mak, Jason C. C.; Chen, Hong; Luo, Xianshu; Chen, Fu-Der; Chua, Hongyao; Weiss, Frank; Alexiev, Christopher; Stalmashonak, Andrei; Jung, Youngho; Straguzzi, John N.; Lo, Guo-Qiang; Sacher, Wesley D.; Poon, Joyce K. S.

doi:10.1038/s41467-023-38260-8

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Microcantilever-integrated photonic circuits for broadband laser beam scanning

MPS-Authors

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Sharif Azadeh, Saeed
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons260634

Chen, Hong
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons290353

Weiss, Frank
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons265926

Stalmashonak, Andrei
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258007

Jung, Youngho
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons260274

Straguzzi, John N.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258003

Sacher, Wesley D.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons257612

Poon, Joyce K. S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Citation

Sharif Azadeh, S., Mak, J. C. C., Chen, H., Luo, X., Chen, F.-D., Chua, H., et al. (2023). Microcantilever-integrated photonic circuits for broadband laser beam scanning. Nature Communications, 14: 2641. doi:10.1038/s41467-023-38260-8.

Cite as: https://hdl.handle.net/21.11116/0000-000D-4DC4-0

Abstract

Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm₂ areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.