Probing crystallinity and grain structure of 2D materials and 2D-like van der 
Waals heterostructures by low-voltage electron diffraction

Müller, Johannes; Heyl, Max; Schultz, Thorsten; Elsner, Kristiane; Schloz, Marcel; Rühl, Steffen; Seiler, Helene; Koch, Norbert; List-Kratochvil, Emil J.W.; Koch, Christoph T.

doi:10.1002/pssa.202300148

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Probing crystallinity and grain structure of 2D materials and 2D-like van der Waals heterostructures by low-voltage electron diffraction

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Seiler, Helene
Physical Chemistry, Fritz Haber Institute, Max Planck Society;

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Physica Status Solidi a - 2023 - Müller - Probing Crystallinity and Grain Structure of 2D Materials and 2D‐Like Van der.pdf
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引用

Müller, J., Heyl, M., Schultz, T., Elsner, K., Schloz, M., Rühl, S., Seiler, H., Koch, N., List-Kratochvil, E. J., & Koch, C. T. (2024). Probing crystallinity and grain structure of 2D materials and 2D-like van der Waals heterostructures by low-voltage electron diffraction. Physica Status Solidi A, 221(1):. doi:10.1002/pssa.202300148.

引用: https://hdl.handle.net/21.11116/0000-000D-8165-F

要旨

Four dimensional scanning transmission electron microscopy (4D-STEM) is a powerful method for characterizing electron-transparent samples with down to sub-Ångstrom spatial resolution. 4D-STEM can reveal local crystallinity, orientation, grain size, strain and many more sample properties by rastering a convergent electron beam over a sample area and acquiring a transmission diffraction pattern (DP) at each scan position. These patterns are rich in information about the atomic structure of the probed volume, making this technique a potent tool to characterize even inhomogeneous samples. 4D-STEM can also be employed in scanning electron microscopes (SEMs) by placing an electron-sensitive camera below the sample. 4D-STEM-in-SEMs is ideally suited to characterize two dimensional (2D) materials and 2D-like van der Waals heterostructures (vdWH) due to their inherent thickness of a few nm. The lower accelerating voltage of SEMs leads to strong scattering even from monolayers. The large field of view and down to sub-nm spatial resolution of SEMs is ideal to map properties of the different constituents of 2D-like vdWH by probing their combined sample volume. We apply our 4D-STEM-in-SEM system to reveal the single crystallinity of MoS₂ exfoliated with gold-mediation and determine the crystal orientation and coverage of both components of a C60/MoS₂ vdWH.