3D nanofabrication on complex seed shapes using glancing angle deposition

Jeong, H.-H.; Mark, A.; Gibbs, J.; Reindl, T.; Waizmann, U.; Weis, J.; Fischer, P.

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3D nanofabrication on complex seed shapes using glancing angle deposition

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Waizmann, U.
Scientific Facility Nanostructuring Lab (Jürgen Weis), Max Planck Institute for Solid State Research, Max Planck Society;

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Weis, J.
Scientific Facility Nanostructuring Lab (Jürgen Weis), Max Planck Institute for Solid State Research, Max Planck Society;
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Jeong, H.-H., Mark, A., Gibbs, J., Reindl, T., Waizmann, U., Weis, J., et al. (2014). 3D nanofabrication on complex seed shapes using glancing angle deposition. 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 20397, 437-440.

Cite as: https://hdl.handle.net/21.11116/0000-000E-CB4E-7

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