A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

Wagner, T.; Krotzky, S.; Weiss, A.; Sauerwald, T.; Kohl, C. D.; Roggenbuck, J.; Tiemann, M.

Item

ITEM ACTIONSEXPORT

Add to Basket

Local TagsRelease HistoryDetailsSummary

Released

Journal Article

A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica

MPS-Authors

/persons/resource/persons280630

Wagner, T.
Miscellaneous, Max Planck Institute for Solid State Research, Max Planck Society;

Krotzky, S.
Max Planck Society;

External Resource

No external resources are shared

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

Wagner, T., Krotzky, S., Weiss, A., Sauerwald, T., Kohl, C. D., Roggenbuck, J., et al. (2011). A High Temperature Capacitive Humidity Sensor Based on Mesoporous Silica. Sensors, 11(3), 3135-3144.

Cite as: https://hdl.handle.net/21.11116/0000-000E-BFE5-9

Abstract

Capacitive sensors are the most commonly used devices for the detection of humidity because they are inexpensive and the detection mechanism is very specific for humidity. However, especially for industrial processes, there is a lack of dielectrics that are stable at high temperature (>200 degrees C) and under harsh conditions. We present a capacitive sensor based on mesoporous silica as the dielectric in a simple sensor design based on pressed silica pellets. Investigation of the structural stability of the porous silica under simulated operating conditions as well as the influence of the pellet production will be shown. Impedance measurements demonstrate the utility of the sensor at both low (90 degrees C) and high (up to 210 degrees C) operating temperatures.