Evaluation of the depth resolutions of Auger electron spectroscopic, X-ray 
photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric 
sputter depth profiling techniques

Wang, J. Y.; Starke, U.; Mittemeijer, E. J.

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Evaluation of the depth resolutions of Auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques

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Starke, U.
Scientific Facility Interface Analysis (Ulrich Starke), Max Planck Institute for Solid State Research, Max Planck Society;

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Wang, J. Y., Starke, U., & Mittemeijer, E. J. (2009). Evaluation of the depth resolutions of Auger electron spectroscopic, X-ray photoelectron spectroscopic and time-of-flight secondary-ion mass spectrometric sputter depth profiling techniques. Thin Solid Films, 517(11 Sp. Iss.), 3402-3407.

Cite as: https://hdl.handle.net/21.11116/0000-000E-BB45-2

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