Synthesis of individual single-walled carbon nanotube bridges controlled by 
support micromachining

Jungen, A.; Hofmann, S.; Meyer, J. C.; Stampfer, C.; Roth, S.; Robertson, J.; Hierold, C.

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Synthesis of individual single-walled carbon nanotube bridges controlled by support micromachining

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Meyer, J. C.
Research Group Solid State Nanophysics (Jurgen H. Smet), Max Planck Institute for Solid State Research, Max Planck Society;
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Roth, S.
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Citation

Jungen, A., Hofmann, S., Meyer, J. C., Stampfer, C., Roth, S., Robertson, J., et al. (2007). Synthesis of individual single-walled carbon nanotube bridges controlled by support micromachining. Journal of Micromechanics and Microengineering, 17(3), 603-608.

Cite as: https://hdl.handle.net/21.11116/0000-000E-B4CD-0

Abstract

Single-walled carbon nanotubes (SWNTs) were directly grown onto poly-crystalline silicon grids by catalytic thermal chemical vapour deposition. We demonstrate that simple micromachining of the catalyst-covered support can influence the number, location and alignment of suspended SWNTs. Sharp apexes formed by over-etching circular microstructures enable the scalable, cost-efficient formation of mostly individual, straight SWNT bridges, as verified by Raman scattering and electron diffraction.