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Ionic Liquid Gating of SrTiO3 Lamellas Fabricated with a Focused Ion Beam

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Zimmerling,  Tino
Physics of Microstructured Quantum Matter, Max Planck Institute for Chemical Physics of Solids, Max Planck Society;

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Estry,  Amelia
Physics of Microstructured Quantum Matter, Max Planck Institute for Chemical Physics of Solids, Max Planck Society;

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Moll,  Philip J. W.
Physics of Microstructured Quantum Matter, Max Planck Institute for Chemical Physics of Solids, Max Planck Society;

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Citation

Mikheev, E., Zimmerling, T., Estry, A., Moll, P. J. W., & Goldhaber-Gordon, D. (2022). Ionic Liquid Gating of SrTiO3 Lamellas Fabricated with a Focused Ion Beam. Nano Letters, 22(10), 3872-3878. doi:10.1021/acs.nanolett.1c04447.


Cite as: https://hdl.handle.net/21.11116/0000-000E-2CC2-6
Abstract
In this work, we combine two previously incompatible techniques for defining electronic devices: shaping three-dimensional crystals by focused ion beam (FIB), and two-dimensional electrostatic accumulation of charge carriers. The principal challenge for this integration is nanometer-scale surface damage inherent to any FIB-based fabrication. We address this by using a sacrificial protective layer to preserve a selected pristine surface. The test case presented here is accumulation of 2D carriers by ionic liquid gating at the surface of a micron-scale SrTiO3 lamella. Preservation of surface quality is reflected in superconductivity of the accumulated carriers. This technique opens new avenues for realizing electrostatic charge tuning in materials that are not available as large or exfoliatable single crystals, and for patterning the geometry of the accumulated carriers.