Comparing AFM cantilever stiffness measured using the thermal vibration and the 
improved thermal vibration methods with that of an SI traceable method based on 
MEMS

Brand, Uwe; Gao, Sai; Engl, Wolfgang; Sulzbach, Thomas; Stahl, Stefan W; Milles, Lukas F.; Nesterov, Vladimir; Li, Zhi

doi:1361-6501/28/3/034010

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Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS

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Brand, U., Gao, S., Engl, W., Sulzbach, T., Stahl, S. W., Milles, L. F., et al. (2017). Comparing AFM cantilever stiffness measured using the thermal vibration and the improved thermal vibration methods with that of an SI traceable method based on MEMS. Measurement Science and Technology, 28(3): 034010. doi:1361-6501/28/3/034010.

Cite as: https://hdl.handle.net/21.11116/0000-000F-8453-E

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