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Monolithically Integrated Visible-Light MEMS Switch

MPS-Authors
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Govdeli,  Alperen
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Chen,  Hong       
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Azadeh,  Saeed S.       
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Straguzzi,  John N.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Poon,  Joyce K. S.       
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Sacher,  Wesley D.       
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

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Citation

Govdeli, A., Chen, H., Azadeh, S. S., Straguzzi, J. N., Chua, H., Lo, G.-Q., et al. (2024). Monolithically Integrated Visible-Light MEMS Switch. In J. Witzens, J. Poon, L. Zimmermann, & W. Freude (Eds.), The 25th European Conference on Integrated Optics: Proceedings of the ECIO (pp. 279-283). Cham: Springer Nature Switzerland. doi:10.1007/978-3-031-63378-2_46.


Cite as: https://hdl.handle.net/21.11116/0000-000F-AEED-3
Abstract
We demonstrate a monolithically integrated, electrostatic MEMS-actuated optical switch for visible light with >7 dB extinction ratio and 2.5 dB loss at a wavelength of 540 nm. We measured rise and fall times of 5 µs and 28 µs, respectively, and a low static power dissipation of <1 nW.