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KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor.

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Stuke,  M.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Foulon, F., & Stuke, M. (1993). KrF excimer laser projection patterned deposition of aluminum from triethylamine alane as adsorbate precursor. Applied Physics Letters, 62(18), 2173-2175.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0013-0765-F
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