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Journal Article

Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors.

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Lehmann,  O.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Stuke,  M.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Foulon, F., Lehmann, O., & Stuke, M. (1993). Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors. Applied Surface Science, 69(1-4), 87-93.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0013-0770-6
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