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Argon-ion laser direct-write Al deposition from trialkylamine alane precursors.

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Stuke,  M.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Foulon, F., & Stuke, M. (1993). Argon-ion laser direct-write Al deposition from trialkylamine alane precursors. Applied Physics A-Materials Science & Processing, 56(3), 283-289.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0013-07DC-7
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