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Journal Article

Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned palladium.

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Lehmann,  O.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Stuke,  M.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Lehmann, O., & Stuke, M. (1992). Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned palladium. Applied Physics Letters, 61(17), 2027-2029.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0013-08C1-E
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