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2-step aluminum thin-film deposition on KRF-laser patterned palladium from liquid triethylamine alane.

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Lehmann,  O.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Stuke,  M.
Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society;

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Lehmann, O., & Stuke, M. (1992). 2-step aluminum thin-film deposition on KRF-laser patterned palladium from liquid triethylamine alane. European Journal of Solid State and Inorganic Chemistry, 29(Suppl. Suppl. S), 147-153.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0013-0A9A-7
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