Vanadium Oxide Sensing Layer Grown on Carbon Nanotubes by a New Atomic Layer 
Deposition Process

Willinger, Marc Georg; Neri, Giovanni; Rauwel, Erwan; Bonavita, Anna; Micali, Giuseppe; Pinna, Nicola

doi:10.1021/nl801785b

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Vanadium Oxide Sensing Layer Grown on Carbon Nanotubes by a New Atomic Layer Deposition Process

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Willinger, Marc Georg
Inorganic Chemistry, Fritz Haber Institute, Max Planck Society;

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Citation

Willinger, M. G., Neri, G., Rauwel, E., Bonavita, A., Micali, G., & Pinna, N. (2008). Vanadium Oxide Sensing Layer Grown on Carbon Nanotubes by a New Atomic Layer Deposition Process. Nano Letters, 8(12), 4201-4204. doi:10.1021/nl801785b.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0010-FBA5-B

Abstract

A new atomic layer deposition (ALD) process was applied for the homogeneous coating of carbon nanotubes with vanadium oxide. It permits the coating of the inner and outer surface with a highly conformal film of controllable thickness and, hence, the production of high surface area hybrid materials at a so far unprecedented quality. The ALD-coated tubes are used as active component in gas-sensing devices. They show electric responses that are directly related to the peculiar structure, i.e., the p−n heterojunction formed between the support and the film.