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Journal Article

Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses

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Kock,  Matthias
Physical Chemistry, Fritz Haber Institute, Max Planck Society;

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Schuster,  Rolf
Physical Chemistry, Fritz Haber Institute, Max Planck Society;

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Citation

Trimmer, A. L., Hudson, J. L., Kock, M., & Schuster, R. (2003). Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses. Applied Physics Letters, 82(19), 3327-3329. doi:10.1063/1.1576499.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0011-104C-F
Abstract
We show that complex patterns including three-dimensional structures, lines, curved features, and arrays can be machined in substrates in single-step processing without the need for rastering. High-aspect-ratio nanometer accurate features were machined in nickel using ultrashort voltage pulse electrochemical machining. Experiments were conducted with two different tool shapes. The first was a combination of rrectangles, squares, and a half circle; the second was a 2x2 array. The effect of pulse duration and electrolyte concentration on feature resolution was studied. Structures with 90 nm widths were made by applying 2 ns voltage pulses.