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Abstract

Thin zirconia films prepared by self-assembled monolayer (SAM) mediated deposition from aqueous medium was investigated by transmission electron microscopy (TEM) and electron-energy loss spectroscopy (EELS). As-grown films were amorphous, and annealing at temperatures below 525°C did not influence the film structure. Annealing at 550°C led to crystallization; amorphous material transformed into the tetragonal phase of ZrO2, yielding a polycrystalline film consisting of 10-50 nm sized grains. After annealing at 600ºC, a small fraction of monoclinic phase was detected in addition to the tetragonal phase. Sulphur signals were visible in EDX spectra of as-grown and of annealed films, with a reduced sulphur content after annealing. Electron beam irradiation also induced crystallization of amorphous material in as-grown films to give tetragonal ZrO2; in this case the grains forming the polycrystalline film were only 5-10 nm in size.