Bonding and morphology study of carbon nitride films obtained by dual ion beam 
sputtering

Quirós, C.; Prieto, P.; Fernandez, A.; Elizalde, E.; Mornt, C.; Schlögl, Robert; Spillecke, Otto; Sanz, J. M.

doi:10.1116/1.582218

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Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering

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Schlögl, Robert
Inorganic Chemistry, Fritz Haber Institute, Max Planck Society;

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Spillecke, Otto
Inorganic Chemistry, Fritz Haber Institute, Max Planck Society;

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Quirós, C., Prieto, P., Fernandez, A., Elizalde, E., Mornt, C., Schlögl, R., et al. (2000). Bonding and morphology study of carbon nitride films obtained by dual ion beam sputtering. Journal of Vacuum Science and Technology. A, 18(2), 515-523. doi:10.1116/1.582218.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0011-1B95-B

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