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Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge

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Hou,  Lu-Jing
Theory and Complex Plasmas, MPI for Extraterrestrial Physics, Max Planck Society;

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Zhang, Q.-Z., Jiang, W., Hou, L.-J., & Wang, Y.-N. (2011). Numerical simulations of electrical asymmetry effect on electronegative plasmas in capacitively coupled rf discharge. Journal of Applied Physics, 109(1): 013308, pp. 1-8. doi:10.1063/1.3530626.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0011-3187-E
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