Resonant interferometric lithography beyond the diffraction limit

Kiffner, M.; Evers, J.; Zubairy, M. S.

doi:10.1103/PhysRevLett.100.073602

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Resonant interferometric lithography beyond the diffraction limit

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Kiffner, M.
Division Prof. Dr. Christoph H. Keitel, MPI for Nuclear Physics, Max Planck Society;

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Evers, J.
Division Prof. Dr. Christoph H. Keitel, MPI for Nuclear Physics, Max Planck Society;

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Zubairy, M. S.
Division Prof. Dr. Christoph H. Keitel, MPI for Nuclear Physics, Max Planck Society;

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http://link.aps.org/doi/10.1103/PhysRevLett.100.073602
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Kiffner, M., Evers, J., & Zubairy, M. S. (2008). Resonant interferometric lithography beyond the diffraction limit. Physical Review Letters, 100(7): 073602. doi:10.1103/PhysRevLett.100.073602.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0011-7A33-8

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