Point-spread functions for backscattered imaging in the scanning electron 
microscope

Hennig, P; Denk, W

doi:10.1063/1.2817591

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Point-spread functions for backscattered imaging in the scanning electron microscope

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https://aip.scitation.org/doi/pdf/10.1063/1.2817591?class=pdf
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Zitation

Hennig, P., & Denk, W. (2007). Point-spread functions for backscattered imaging in the scanning electron microscope. Journal of Applied Physics, 102(12): 123101, pp. 1-8. doi:10.1063/1.2817591.

Zitierlink: https://hdl.handle.net/11858/00-001M-0000-0013-CAEB-3

Zusammenfassung

One knows the imaging system's properties are central to the correct interpretation of any image. In a scanning electron microscope regions of different composition generally interact in a highly nonlinear way during signal generation. Using Monte Carlo simulations we found that in resin-embedded, heavy metal-stained biological specimens staining is sufficiently dilute to allow an approximately linear treatment. We then mapped point-spread functions for backscattered-electron contrast, for primary energies of 3 and 7 keV and for different detector specifications. The point-spread functions are surprisingly well confined (both laterally and in depth) compared even to the distribution of only those scattered electrons that leave the sample again.