date: 2011-05-04T13:40:04Z pdf:unmappedUnicodeCharsPerPage: 0 pdf:PDFVersion: 1.4 pdf:docinfo:title: Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: experiment and modeling xmp:CreatorTool: Writer access_permission:modify_annotations: true access_permission:can_print_degraded: true dc:creator: Ivan B language: en-US dcterms:created: 2011-05-04T13:11:40Z Last-Modified: 2011-05-04T13:40:04Z dcterms:modified: 2011-05-04T13:40:04Z dc:format: application/pdf; version=1.4 title: Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: experiment and modeling xmpMM:DocumentID: uuid:ab5d9fce-84c2-4577-9453-bcd8ebe47d03 Last-Save-Date: 2011-05-04T13:40:04Z pdf:docinfo:creator_tool: Writer access_permission:fill_in_form: true pdf:docinfo:modified: 2011-05-04T13:40:04Z meta:save-date: 2011-05-04T13:40:04Z pdf:encrypted: false dc:title: Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: experiment and modeling modified: 2011-05-04T13:40:04Z Content-Type: application/pdf pdf:docinfo:creator: Ivan B X-Parsed-By: org.apache.tika.parser.DefaultParser creator: Ivan B dc:language: en-US meta:author: Ivan B meta:creation-date: 2011-05-04T13:11:40Z created: 2011-05-04T13:11:40Z access_permission:extract_for_accessibility: true access_permission:assemble_document: true xmpTPg:NPages: 19 Creation-Date: 2011-05-04T13:11:40Z pdf:charsPerPage: 2156 access_permission:extract_content: true access_permission:can_print: true Author: Ivan B producer: OpenOffice.org 3.2 access_permission:can_modify: true pdf:docinfo:producer: OpenOffice.org 3.2 pdf:docinfo:created: 2011-05-04T13:11:40Z