Sputtered Energy Coefficient and Sputtering Yield

Eckstein, W.

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Sputtered Energy Coefficient and Sputtering Yield

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Eckstein, W.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Eckstein, W.(2011). Sputtered Energy Coefficient and Sputtering Yield (IPP 17/29). Garching: Max-Planck-Institut für Plasmaphysik.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-EDB5-6

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