date: 2010-10-08T08:09:59Z
pdf:unmappedUnicodeCharsPerPage: 0
pdf:PDFVersion: 1.4
pdf:docinfo:title: Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: experiment and modeling
xmp:CreatorTool: Writer
access_permission:modify_annotations: true
access_permission:can_print_degraded: true
dc:creator: Ivan B
language: en-US
dcterms:created: 2010-10-06T15:25:31Z
Last-Modified: 2010-10-08T08:09:59Z
dcterms:modified: 2010-10-08T08:09:59Z
dc:format: application/pdf; version=1.4
title: Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: experiment and modeling
xmpMM:DocumentID: uuid:f412f15a-ddcd-4ff8-b91b-8a8a2aedd238
Last-Save-Date: 2010-10-08T08:09:59Z
pdf:docinfo:creator_tool: Writer
access_permission:fill_in_form: true
pdf:docinfo:modified: 2010-10-08T08:09:59Z
meta:save-date: 2010-10-08T08:09:59Z
pdf:encrypted: false
dc:title: Evolution of the 2D surface structure of a silicon pitch grating under argon ion bombardment: experiment and modeling
modified: 2010-10-08T08:09:59Z
Content-Type: application/pdf
pdf:docinfo:creator: Ivan B
X-Parsed-By: org.apache.tika.parser.DefaultParser
creator: Ivan B
dc:language: en-US
meta:author: Ivan B
meta:creation-date: 2010-10-06T15:25:31Z
created: 2010-10-06T15:25:31Z
access_permission:extract_for_accessibility: true
access_permission:assemble_document: true
xmpTPg:NPages: 19
Creation-Date: 2010-10-06T15:25:31Z
pdf:charsPerPage: 2045
access_permission:extract_content: true
access_permission:can_print: true
Author: Ivan B
producer: OpenOffice.org 3.2
access_permission:can_modify: true
pdf:docinfo:producer: OpenOffice.org 3.2
pdf:docinfo:created: 2010-10-06T15:25:31Z