Investigation of the RF efficiency of inductively coupled hydrogen plasmas at 
1 MHz

Rauner, D.; Mattei, S.; Briefi, S.; Fantz, U.; Hatayama, A.; Lettry, J.; Nishida, K.; Tran, M. Q.

doi:10.1063/1.4995755

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Journal Article

Investigation of the RF efficiency of inductively coupled hydrogen plasmas at 1 MHz

MPS-Authors

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Rauner, D.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
External Organizations;

Mattei, S.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons108790

Briefi, S.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fantz, U.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;
External Organizations;

Hatayama, A.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

Lettry, J.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

Nishida, K.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

Tran, M. Q.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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http://dx.doi.org/10.1063/1.4995755
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Rauner_Investigation.pdf
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Citation

Rauner, D., Mattei, S., Briefi, S., Fantz, U., Hatayama, A., Lettry, J., et al. (2017). Investigation of the RF efficiency of inductively coupled hydrogen plasmas at 1 MHz. AIP Conference Proceedings, 1869(1): 030035. doi:10.1063/1.4995755.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002D-E8E5-7

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