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Redeposition of soft amorphous hydrogenated carbon films after thermal decomposition

MPS-Authors
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Dürbeck,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Salancon, E., Dürbeck, T., Schwarz-Selinger, T., & Jacob, W. (2006). Redeposition of soft amorphous hydrogenated carbon films after thermal decomposition. Poster presented at 17th International Conference of Plasma Surface Interactions in Controlled Fusion Devices (PSI 17), Hefei Anhui.


Cite as: https://hdl.handle.net/21.11116/0000-0000-14D8-6
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