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Chemische Zerstäubung mit reaktiven Ionen

MPS-Authors
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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Hopf,  C.
ITER Technology & Diagnostics (ITED), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob, W., Hopf, C., Schlüter, M., & Schwarz-Selinger, T. (2008). Chemische Zerstäubung mit reaktiven Ionen. Talk presented at XV. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2008-03-04 - 2008-03-06.


Cite as: https://hdl.handle.net/21.11116/0000-0000-1D81-E
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