date: 2018-06-07T06:40:08Z pdf:unmappedUnicodeCharsPerPage: 0 pdf:PDFVersion: 1.5 pdf:docinfo:title: Microsoft Word - Refined Multiphysics Analysis of W7-X Cryopumps (without publisher layout) xmp:CreatorTool: PScript5.dll Version 5.2.2 access_permission:modify_annotations: true access_permission:can_print_degraded: true dc:creator: makr dcterms:created: 2018-06-07T06:40:08Z Last-Modified: 2018-06-07T06:40:08Z dcterms:modified: 2018-06-07T06:40:08Z dc:format: application/pdf; version=1.5 title: Microsoft Word - Refined Multiphysics Analysis of W7-X Cryopumps (without publisher layout) xmpMM:DocumentID: uuid:25af1f1d-05a1-4bf9-a19e-4cc2d1fa2ea5 Last-Save-Date: 2018-06-07T06:40:08Z pdf:docinfo:creator_tool: PScript5.dll Version 5.2.2 access_permission:fill_in_form: true pdf:docinfo:modified: 2018-06-07T06:40:08Z meta:save-date: 2018-06-07T06:40:08Z pdf:encrypted: false dc:title: Microsoft Word - Refined Multiphysics Analysis of W7-X Cryopumps (without publisher layout) modified: 2018-06-07T06:40:08Z Content-Type: application/pdf pdf:docinfo:creator: makr X-Parsed-By: org.apache.tika.parser.DefaultParser creator: makr meta:author: makr meta:creation-date: 2018-06-07T06:40:08Z created: 2018-06-07T06:40:08Z access_permission:extract_for_accessibility: true access_permission:assemble_document: true xmpTPg:NPages: 15 Creation-Date: 2018-06-07T06:40:08Z pdf:charsPerPage: 2724 access_permission:extract_content: true access_permission:can_print: true Author: makr producer: Acrobat Distiller 9.5.5 (Windows) access_permission:can_modify: true pdf:docinfo:producer: Acrobat Distiller 9.5.5 (Windows) pdf:docinfo:created: 2018-06-07T06:40:08Z