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pdf:docinfo:title: New type of metal ion source: Surface diffusion Li+ ion source
dc:description: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 1995.13:621-624
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title: New type of metal ion source: Surface diffusion Li+ ion source
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dc:title: New type of metal ion source: Surface diffusion Li+ ion source
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cp:subject: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 1995.13:621-624
pdf:docinfo:subject: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 1995.13:621-624
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Affiliation: Fritz-Haber-Institut der Max-Planck-Gesellschaft, Faradayweg 4-6, 14195 Berlin, Germany
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