date: 2022-03-16T15:01:41Z pdf:PDFVersion: 1.6 pdf:docinfo:title: Ultra-shallow dopant profiles as in-situ electrodes in scanning probe microscopy xmp:CreatorTool: Springer access_permission:can_print_degraded: true subject: Scientific Reports, https://doi.org/10.1038/s41598-022-07551-3 pdfa:PDFVersion: A-2b xmpMM:History:Action: converted language: en-US dc:format: application/pdf; version=1.6 pdf:docinfo:custom:robots: noindex pdf:docinfo:creator_tool: Springer access_permission:fill_in_form: true xmpMM:History:When: 2022-03-02T18:51:23Z pdf:encrypted: false dc:title: Ultra-shallow dopant profiles as in-situ electrodes in scanning probe microscopy modified: 2022-03-16T15:01:41Z cp:subject: Scientific Reports, https://doi.org/10.1038/s41598-022-07551-3 xmpMM:History:SoftwareAgent: pdfToolbox pdf:docinfo:custom:CrossMarkDomains[1]: springer.com robots: noindex pdf:docinfo:subject: Scientific Reports, https://doi.org/10.1038/s41598-022-07551-3 xmpMM:History:InstanceID: uuid:c4719e4c-7316-4c71-99c8-e25834752e41 pdf:docinfo:creator: Alexander Kölker meta:author: Martin Wolf meta:creation-date: 2022-03-02T13:20:45Z pdf:docinfo:custom:CrossmarkMajorVersionDate: 2010-04-23 created: 2022-03-02T13:20:45Z access_permission:extract_for_accessibility: true Creation-Date: 2022-03-02T13:20:45Z pdfaid:part: 2 pdf:docinfo:custom:CrossMarkDomains[2]: springerlink.com pdf:docinfo:custom:doi: 10.1038/s41598-022-07551-3 pdf:docinfo:custom:CrossmarkDomainExclusive: true Author: Martin Wolf producer: Adobe PDF Library 15.0; modified using iText® 5.3.5 ©2000-2012 1T3XT BVBA (SPRINGER SBM; licensed version) CrossmarkDomainExclusive: true pdf:docinfo:producer: Adobe PDF Library 15.0; modified using iText® 5.3.5 ©2000-2012 1T3XT BVBA (SPRINGER SBM; licensed version) doi: 10.1038/s41598-022-07551-3 pdf:unmappedUnicodeCharsPerPage: 0 dc:description: Scientific Reports, https://doi.org/10.1038/s41598-022-07551-3 access_permission:modify_annotations: true dc:creator: Martin Wolf description: Scientific Reports, https://doi.org/10.1038/s41598-022-07551-3 dcterms:created: 2022-03-02T13:20:45Z Last-Modified: 2022-03-16T15:01:41Z dcterms:modified: 2022-03-16T15:01:41Z title: Ultra-shallow dopant profiles as in-situ electrodes in scanning probe microscopy xmpMM:DocumentID: uuid:1c760859-4559-4fef-9b58-9d7aabf6985d Last-Save-Date: 2022-03-16T15:01:41Z CrossMarkDomains[1]: springer.com pdf:docinfo:modified: 2022-03-16T15:01:41Z meta:save-date: 2022-03-16T15:01:41Z Content-Type: application/pdf X-Parsed-By: org.apache.tika.parser.DefaultParser creator: Martin Wolf pdfaid:conformance: B dc:language: en-US access_permission:assemble_document: true xmpTPg:NPages: 10 pdf:charsPerPage: 4857 access_permission:extract_content: true access_permission:can_print: true CrossMarkDomains[2]: springerlink.com access_permission:can_modify: true pdf:docinfo:created: 2022-03-02T13:20:45Z CrossmarkMajorVersionDate: 2010-04-23