date: 2021-12-14T08:22:12Z
pdf:PDFVersion: 1.6
pdf:docinfo:title: Development of ion beam sputtering for multilayer dispersive mirrors
xmp:CreatorTool: LaTeX with hyperref
access_permission:can_print_degraded: true
subject: 
language: en-GB
dc:format: application/pdf; version=1.6
pdf:docinfo:creator_tool: LaTeX with hyperref
access_permission:fill_in_form: true
pdf:encrypted: false
dc:title: Development of ion beam sputtering for multilayer dispersive mirrors
modified: 2021-12-14T08:22:12Z
cp:subject: 
pdf:docinfo:subject: 
pdf:docinfo:creator: Yu Chen
PTEX.Fullbanner: This is pdfTeX, Version 3.14159265-2.6-1.40.20 (TeX Live 2019) kpathsea version 6.3.1
meta:author: Yu Chen
trapped: False
meta:creation-date: 2021-12-13T11:30:28Z
created: 2021-12-13T11:30:28Z
access_permission:extract_for_accessibility: true
Creation-Date: 2021-12-13T11:30:28Z
Author: Yu Chen
producer: pdfTeX-1.40.20
pdf:docinfo:producer: pdfTeX-1.40.20
pdf:unmappedUnicodeCharsPerPage: 0
Keywords: 
access_permission:modify_annotations: true
dc:creator: Yu Chen
dcterms:created: 2021-12-13T11:30:28Z
Last-Modified: 2021-12-14T08:22:12Z
dcterms:modified: 2021-12-14T08:22:12Z
title: Development of ion beam sputtering for multilayer dispersive mirrors
xmpMM:DocumentID: uuid:168b6901-f7da-a74a-be55-f1f1076bc276
Last-Save-Date: 2021-12-14T08:22:12Z
pdf:docinfo:keywords: 
pdf:docinfo:modified: 2021-12-14T08:22:12Z
meta:save-date: 2021-12-14T08:22:12Z
pdf:docinfo:custom:PTEX.Fullbanner: This is pdfTeX, Version 3.14159265-2.6-1.40.20 (TeX Live 2019) kpathsea version 6.3.1
Content-Type: application/pdf
X-Parsed-By: org.apache.tika.parser.DefaultParser
creator: Yu Chen
dc:language: en-GB
dc:subject: 
access_permission:assemble_document: true
xmpTPg:NPages: 114
pdf:charsPerPage: 77
access_permission:extract_content: true
access_permission:can_print: true
pdf:docinfo:trapped: False
meta:keyword: 
access_permission:can_modify: true
pdf:docinfo:created: 2021-12-13T11:30:28Z