date: 2022-12-13T13:42:05Z pdf:unmappedUnicodeCharsPerPage: 0 pdf:PDFVersion: 1.4 pdf:docinfo:title: Step pinning and hillock formation in (Al,Ga)N films on native AlN substrates xmp:CreatorTool: Arbortext Advanced Print Publisher 10.0.1465/W Unicode dc:description: J. Appl. Phys.2022.132:223102 access_permission:modify_annotations: true access_permission:can_print_degraded: true subject: Journal of Applied Physics 2022.132:223102 description: J. Appl. Phys.2022.132:223102 dcterms:created: 2022-12-08T12:49:46Z Last-Modified: 2022-12-13T13:42:05Z dcterms:modified: 2022-12-13T13:42:05Z dc:format: application/pdf; version=1.4 title: Step pinning and hillock formation in (Al,Ga)N films on native AlN substrates Last-Save-Date: 2022-12-13T13:42:05Z pdf:docinfo:creator_tool: Arbortext Advanced Print Publisher 10.0.1465/W Unicode access_permission:fill_in_form: true pdf:docinfo:modified: 2022-12-13T13:42:05Z meta:save-date: 2022-12-13T13:42:05Z pdf:encrypted: false dc:title: Step pinning and hillock formation in (Al,Ga)N films on native AlN substrates modified: 2022-12-13T13:42:05Z cp:subject: Journal of Applied Physics 2022.132:223102 pdf:docinfo:subject: Journal of Applied Physics 2022.132:223102 Content-Type: application/pdf X-Parsed-By: org.apache.tika.parser.DefaultParser meta:creation-date: 2022-12-08T12:49:46Z created: 2022-12-08T12:49:46Z access_permission:extract_for_accessibility: true access_permission:assemble_document: true xmpTPg:NPages: 9 Creation-Date: 2022-12-08T12:49:46Z pdf:charsPerPage: 884 access_permission:extract_content: true access_permission:can_print: true producer: iText 4.2.0 by 1T3XT access_permission:can_modify: true pdf:docinfo:producer: iText 4.2.0 by 1T3XT pdf:docinfo:created: 2022-12-08T12:49:46Z