date: 2022-11-04T02:26:20Z
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pdf:docinfo:title: Calibration of Deformable Mirrors for Open-Loop Control
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Keywords: off-axis interferometry; phase unwrapping; deformable mirror control
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subject: Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.
dc:creator: Marcel Leutenegger and Stefan W. Hell
dcterms:created: 2022-11-04T02:10:29Z
Last-Modified: 2022-11-04T02:26:20Z
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title: Calibration of Deformable Mirrors for Open-Loop Control
Last-Save-Date: 2022-11-04T02:26:20Z
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pdf:docinfo:keywords: off-axis interferometry; phase unwrapping; deformable mirror control
pdf:docinfo:modified: 2022-11-04T02:26:20Z
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dc:title: Calibration of Deformable Mirrors for Open-Loop Control
modified: 2022-11-04T02:26:20Z
cp:subject: Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.
pdf:docinfo:subject: Deformable mirrors enable the control of wave fronts for the compensation of aberrations in optical systems and/or for beam scanning. Manufacturers of deformable mirrors typically provide calibration data that encode for the fabrication tolerances among the actuators and mirror segments to support open-loop control with high wave front fidelity and accuracy. We report a calibration method that enables users of the deformable mirrors to measure the response of the mirror itself to validate and improve the calibration data. For this purpose, an imaging off-axis Michelson interferometer was built that allowed measuring the mirror topography with high accuracy and sufficient spatial resolution. By calibrating each actuator over its entire range, the open-loop performance for our deformable mirror was improved.
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pdf:docinfo:creator: Marcel Leutenegger and Stefan W. Hell
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creator: Marcel Leutenegger and Stefan W. Hell
meta:author: Marcel Leutenegger and Stefan W. Hell
dc:subject: off-axis interferometry; phase unwrapping; deformable mirror control
meta:creation-date: 2022-11-04T02:10:29Z
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meta:keyword: off-axis interferometry; phase unwrapping; deformable mirror control
Author: Marcel Leutenegger and Stefan W. Hell
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