An Active Visible-Light Integrated Photonics Platform on 200-mm Si

Sacher, Wesley David; Lin, Yiding; Chen, Hong; Azadeh, Saeed S.; Yong, Zheng; Luo, Xianshu; Chua, Hongyao; Mak, Jason C. C.; Govdeli, Alperen; Sharma, Ankita; Mikkelsen, Jared C.; Mu, Xin; Stalmashonak, Andrei; Lo, Guo-Qiang; Poon, Joyce K. S.

doi:10.1364/OFC.2023.Tu3C.5

Item

ITEM ACTIONSEXPORT

Add to Basket

Please note that a newer version of this item is available:
https://pure.mpg.de/pubman/item/item_3516663_3

DetailsSummary

Released

Conference Paper

An Active Visible-Light Integrated Photonics Platform on 200-mm Si

MPS-Authors

/persons/resource/persons258003

Sacher, Wesley David
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258070

Lin, Yiding
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons260634

Chen, Hong
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons258016

Azadeh, Saeed S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons269779

Yong, Zheng
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

Mak, Jason C. C.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons269781

Govdeli, Alperen
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons269799

Sharma, Ankita
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons265928

Mu, Xin
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons265926

Stalmashonak, Andrei
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

/persons/resource/persons257612

Poon, Joyce K. S.
Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society;

External Resource

https://doi.org/10.1364/OFC.2023.Tu3C.5
(Publisher version)

Fulltext (restricted access)

There are currently no full texts shared for your IP range.

Fulltext (public)

There are no public fulltexts stored in PuRe

Supplementary Material (public)

There is no public supplementary material available

Citation

Sacher, W. D., Lin, Y., Chen, H., Azadeh, S. S., Yong, Z., Luo, X., et al. (2023). An Active Visible-Light Integrated Photonics Platform on 200-mm Si. In 2023 Optical Fiber Communications Conference and Exhibition, OFC 2023 - Proceedings. IEEE. doi:10.1364/OFC.2023.Tu3C.5.

Cite as: https://hdl.handle.net/21.11116/0000-000D-5AA5-4

Abstract

We present a foundry-fabricated monolithically integrated photonics platform for the visible spectrum (λ=445–640nm) with two layers of silicon nitride waveguides, silicon photodiodes, efficient undercut thermo-optic phase shifters, in situ trimming, and electro-thermal MEMS devices.