date: 2011-11-02T11:00:11Z pdf:PDFVersion: 1.5 pdf:docinfo:title: Erosion of tungsten-doped amorphous carbon films in oxygen plasma xmp:CreatorTool: Acrobat PDFMaker 9.1 für Word Company: IPP access_permission:can_print_degraded: true subject: dc:format: application/pdf; version=1.5 pdf:docinfo:creator_tool: Acrobat PDFMaker 9.1 für Word access_permission:fill_in_form: true pdf:encrypted: false dc:title: Erosion of tungsten-doped amorphous carbon films in oxygen plasma modified: 2011-11-02T11:00:11Z pdf:docinfo:custom:SourceModified: D:20111027064059 cp:subject: pdf:docinfo:subject: pdf:docinfo:creator: peng wang meta:author: peng wang meta:creation-date: 2011-10-27T06:41:35Z created: 2011-10-27T06:41:35Z access_permission:extract_for_accessibility: true Creation-Date: 2011-10-27T06:41:35Z pdf:docinfo:custom:Comments: Author: peng wang producer: Acrobat Distiller 9.4.6 (Windows) pdf:docinfo:producer: Acrobat Distiller 9.4.6 (Windows) pdf:unmappedUnicodeCharsPerPage: 0 Keywords: access_permission:modify_annotations: true dc:creator: peng wang dcterms:created: 2011-10-27T06:41:35Z Last-Modified: 2011-11-02T11:00:11Z dcterms:modified: 2011-11-02T11:00:11Z title: Erosion of tungsten-doped amorphous carbon films in oxygen plasma xmpMM:DocumentID: uuid:aa401acd-5df2-46de-a3d7-d8b594dc21b0 Last-Save-Date: 2011-11-02T11:00:11Z pdf:docinfo:keywords: pdf:docinfo:modified: 2011-11-02T11:00:11Z meta:save-date: 2011-11-02T11:00:11Z Content-Type: application/pdf X-Parsed-By: org.apache.tika.parser.DefaultParser creator: peng wang dc:subject: Comments: access_permission:assemble_document: true xmpTPg:NPages: 18 pdf:charsPerPage: 1623 access_permission:extract_content: true pdf:docinfo:custom:Company: IPP access_permission:can_print: true SourceModified: D:20111027064059 meta:keyword: access_permission:can_modify: true pdf:docinfo:created: 2011-10-27T06:41:35Z