date: 2019-04-25T05:59:11Z pdf:unmappedUnicodeCharsPerPage: 0 pdf:PDFVersion: 1.4 pdf:docinfo:title: Application of transient CHI plasma startup to future ST and AT devices access_permission:modify_annotations: true access_permission:can_print_degraded: true dcterms:created: 2019-01-31T13:33:20Z Last-Modified: 2019-04-25T05:59:11Z dcterms:modified: 2019-04-25T05:59:11Z dc:format: application/pdf; version=1.4 title: Application of transient CHI plasma startup to future ST and AT devices xmpMM:DocumentID: uuid:0e32c868-07b5-4bc9-ac82-0f33daecea22 Last-Save-Date: 2019-04-25T05:59:11Z access_permission:fill_in_form: true pdf:docinfo:modified: 2019-04-25T05:59:11Z meta:save-date: 2019-04-25T05:59:11Z pdf:encrypted: false dc:title: Application of transient CHI plasma startup to future ST and AT devices modified: 2019-04-25T05:59:11Z Content-Type: application/pdf X-Parsed-By: org.apache.tika.parser.DefaultParser meta:creation-date: 2019-01-31T13:33:20Z created: 2019-01-31T13:33:20Z access_permission:extract_for_accessibility: true access_permission:assemble_document: true xmpTPg:NPages: 15 Creation-Date: 2019-01-31T13:33:20Z pdf:charsPerPage: 4152 access_permission:extract_content: true access_permission:can_print: true pdf:docinfo:custom:doi: 10.1063/1.5087259 producer: itext-paulo-155 (itextpdf.sf.net-lowagie.com); modified using iText® 5.1.3 ©2000-2011 1T3XT BVBA access_permission:can_modify: true pdf:docinfo:producer: itext-paulo-155 (itextpdf.sf.net-lowagie.com); modified using iText® 5.1.3 ©2000-2011 1T3XT BVBA pdf:docinfo:created: 2019-01-31T13:33:20Z doi: 10.1063/1.5087259