Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods

Chifen, A. N.; Knoll, Wolfgang; Förch, Renate

doi:10.1016/j.matlet.2006.07.118

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Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods

Chifen, A. N., Knoll, W., & Förch, R. (2007). Fabrication of nano-porous silicon oxide layers by plasma polymerisation methods. Materials Letters, 61(8-9), 1722-1724. doi:10.1016/j.matlet.2006.07.118.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-000F-7CC8-1 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-E690-0

Genre: Journal Article

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Creators:
Chifen, A. N.¹, Author
Knoll, Wolfgang¹, Author
Förch, Renate¹, Author

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1MPI for Polymer Research, Max Planck Society, ou_1309545

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Language(s): eng - English

Dates: Date issued: 2007

Publication Status: Issued

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Identifiers: eDoc: 315226
Other: P-07-41
DOI: 10.1016/j.matlet.2006.07.118

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Title: Materials Letters

Source Genre: Journal

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Publ. Info: Amsterdam : North-Holland

Pages: - Volume / Issue: 61 (8-9) Sequence Number: - Start / End Page: 1722 - 1724 Identifier: ISSN: 0167-577X
CoNE: https://pure.mpg.de/cone/journals/resource/954925483654