Profile reconstruction in sputter depth profiling

Hofmann, S.

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Profile reconstruction in sputter depth profiling

Hofmann, S. (2001). Profile reconstruction in sputter depth profiling. Thin Solid Films, 398, 336-342.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-33E2-3 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0010-33E3-1

Genre: Journal Article

Alternative Title : Thin Solid Films

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Creators:
Hofmann, S.¹, Author

Affiliations:
1Dept. Phase Transformations; Thermodynamics and Kinetics, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497644

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Free keywords: MPI für Metallforschung; Abt. Mittemeijer; depth profiling; depth resolution function; delta layers; atomic mixing

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Language(s): eng - English

Dates: Date issued: 2001-11-01

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 20441
ISI: 000172906200058

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Title: Thin Solid Films

Alternative Title : Thin Solid Films

Source Genre: Journal

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Pages: - Volume / Issue: 398 Sequence Number: - Start / End Page: 336 - 342 Identifier: ISSN: 0040-6090