Characterization of stationary and pulsed inductively coupled RF discharges for 
plasma sterilization. Invited paper

Gans, T.; Osiac, M.; O'Connell, D.; Kadetov, V. A.; Czarnetzki, U.; Schwarz-Selinger, T.; Halfmann, H.; Awakowicz, P.

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Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization. Invited paper

Gans, T., Osiac, M., O'Connell, D., Kadetov, V. A., Czarnetzki, U., Schwarz-Selinger, T., et al. (2005). Characterization of stationary and pulsed inductively coupled RF discharges for plasma sterilization. Invited paper. Plasma Physics and Controlled Fusion, 47(5A), A353-A360. Retrieved from http://www.iop.org/EJ/abstract/0741-3335/47/5A/026.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1693-7 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-1694-5

Genre: Journal Article

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Creators:
Gans, T.¹, Author
Osiac, M.¹, Author
O'Connell, D.¹, Author
Kadetov, V. A.¹, Author
Czarnetzki, U.¹, Author
Schwarz-Selinger, T.^{2, 3}, Author
Halfmann, H.¹, Author
Awakowicz, P.¹, Author

Affiliations:
1Institute for Plasma and Atomic Physics, CPST, Ruhr-Univ. Bochum, 44780 Bochum; Institute for Electrical Engineering and Plasma Technology, CPST, Ruhr-Univ. Bochum, 44780 Bochum, ou_persistent22
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328
3Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Free keywords: 12th International Congress on Plasma Physics, 2004-10-25 to 2004-10-29

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Language(s): eng - English

Dates: Date issued: 2005

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 220885
URI: http://www.iop.org/EJ/abstract/0741-3335/47/5A/026

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Title: Plasma Physics and Controlled Fusion

Alternative Title : PPCF

Source Genre: Journal

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Pages: - Volume / Issue: 47 (5A) Sequence Number: - Start / End Page: A353 - A360 Identifier: -