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  Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching

Jacob, W., Hopf, C., von Keudell, A., Meier, M., & Schwarz-Selinger, T. (2003). Particle-beam experiment to study heterogeneous surface reactions relevant to plasma-assisted thin film growth and etching. Review of Scientific Instruments, 74(12), 5123-5136. doi:10.1063/1.1628845.

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 Creators:
Jacob, W.1, 2, Author           
Hopf, C.1, 2, Author           
von Keudell, A.1, 2, Author           
Meier, M.1, 2, Author           
Schwarz-Selinger, T.1, 2, Author           
Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325              
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Language(s): eng - English
 Dates: 2003
 Publication Status: Published in print
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Degree: -

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Title: Review of Scientific Instruments
  Alternative Title : Rev. Sci. Instrum.
Source Genre: Journal
 Creator(s):
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Publ. Info: -
Pages: - Volume / Issue: 74 (12) Sequence Number: - Start / End Page: 5123 - 5136 Identifier: -