Investigation of the Influence of Substrate Temperature and Bias Voltage on the 
Crystal Structure of Vacuum Arc Deposited Al2O3 Coatings

Beguiristain Repáraz, I.

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Investigation of the Influence of Substrate Temperature and Bias Voltage on the Crystal Structure of Vacuum Arc Deposited Al₂O₃ Coatings

Beguiristain Repáraz, I. (2001). Investigation of the Influence of Substrate Temperature and Bias Voltage on the Crystal Structure of Vacuum Arc Deposited Al₂O₃ Coatings. Diploma Thesis, Universidad de Navarra, San Sebastián.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-454D-7 Version Permalink: https://hdl.handle.net/21.11116/0000-0006-BFFD-7

Genre: Thesis

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Creators:
Beguiristain Repáraz, I.¹, Author

Affiliations:
1Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328

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Language(s): eng - English

Dates: Accepted: 2001Date issued: 2001

Publication Status: Issued

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Publishing info: San Sebastián : Universidad de Navarra

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Rev. Type: -

Identifiers: eDoc: 217867

Degree: Diploma

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