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  Sputtered Energy Coefficient and Sputtering Yield

Eckstein, W.(2011). Sputtered Energy Coefficient and Sputtering Yield (IPP 17/29). Garching: Max-Planck-Institut für Plasmaphysik.

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 Creators:
Eckstein, W.1, 2, Author           
Affiliations:
1Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              

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Language(s): eng - English
 Dates: 2011
 Publication Status: Issued
 Pages: 75 p.
 Publishing info: Garching : Max-Planck-Institut für Plasmaphysik
 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 574473
Report Nr.: IPP 17/29
 Degree: -

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