Simulation of ion energy distributions in Ar/CH4 rf discharges with ion 
extraction

Ikkurthi, V.; Matyash, K.; Meichsner, J.; Melzer, A.; Schneider, R.

doi:10.1088/0963-0252/18/3/035003

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Simulation of ion energy distributions in Ar/CH₄ rf discharges with ion extraction

Ikkurthi, V., Matyash, K., Meichsner, J., Melzer, A., & Schneider, R. (2009). Simulation of ion energy distributions in Ar/CH₄ rf discharges with ion extraction. Plasma Sources Science and Technology, 18: 035003 (7pp). doi:10.1088/0963-0252/18/3/035003.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F5A6-B Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0026-F5A7-9

Genre: Journal Article

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Creators:
Ikkurthi, V.¹, Author
Matyash, K.^{2, 3}, Author
Meichsner, J.¹, Author
Melzer, A.¹, Author
Schneider, R.^{2, 4}, Author

Affiliations:
1Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, 17489 Greifswald, ou_persistent22
2Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856287
3Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HGF-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society
4Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HFG-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856336

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Language(s): eng - English

Dates: Date issued: 2009

Publication Status: Issued

Pages: -

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Table of Contents: -

Rev. Type: Peer

Identifiers: eDoc: 429770
DOI: 10.1088/0963-0252/18/3/035003
URI: http://dx.doi.org/10.1088/0963-0252/18/3/035003

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Title: Plasma Sources Science and Technology

Source Genre: Journal

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Publ. Info: Institute of Physics and IOP Publishing Limited

Pages: - Volume / Issue: 18 Sequence Number: 035003 (7pp) Start / End Page: - Identifier: -