Simulation of ion energy distributions in Ar/CH4 rf discharges with ion 
extraction

Ikkurthi, V.; Matyash, K.; Meichsner, J.; Melzer, A.; Schneider, R.

doi:10.1088/0963-0252/18/3/035003

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Simulation of ion energy distributions in Ar/CH₄ rf discharges with ion extraction

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Matyash, K.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;
Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HGF-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schneider, R.
Helmholtz Junior Research Group 'Computational Material Science' (Junior Research Group HFG-Greifswald), Max Planck Institute for Plasma Physics, Max Planck Society;
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Ikkurthi, V., Matyash, K., Meichsner, J., Melzer, A., & Schneider, R. (2009). Simulation of ion energy distributions in Ar/CH₄ rf discharges with ion extraction. Plasma Sources Science and Technology, 18:. doi:10.1088/0963-0252/18/3/035003.

引用: https://hdl.handle.net/11858/00-001M-0000-0026-F5A6-B

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