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  Impact of N 2 +H 2 Mixture Plasma on Carbon-containing Film

Voitsenya, V. S., Masuzaki, S., Motojima, O., Sagara, A., & Jacob, W. (2006). Impact of N 2 +H 2 Mixture Plasma on Carbon-containing Film. Problems of Atomic Science and Technology, 6, 141-143.

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 Creators:
Voitsenya, V. S.1, Author
Masuzaki, S.1, Author
Motojima, O.1, Author
Sagara, A.1, Author
Jacob, W.2, Author           
Affiliations:
1Institute of Plasma Physics, NSC "Kharkov Institute of Physics and Technology", Akademicheskaya Str. 1, 61108 Kharokov, Ukraine; National Institute for Fusion Science, 322-6 Oroshi-cho Toki-shi 509-5292, Japan, ou_persistent22              
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              

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Free keywords: 11th International Conference and School on Plasma Physics and Controlles Fusion, Alushta, 2006-09-10 to 2006-09-16
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Language(s): eng - English
 Dates: 2006
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Internal
 Identifiers: eDoc: 294629
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Title: Problems of Atomic Science and Technology
Source Genre: Journal
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Pages: - Volume / Issue: 6 Sequence Number: - Start / End Page: 141 - 143 Identifier: -