Impact of N 2 +H 2 Mixture Plasma on Carbon-containing Film

Voitsenya, V. S.; Masuzaki, S.; Motojima, O.; Sagara, A.; Jacob, W.

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Impact of N ₂ +H ₂ Mixture Plasma on Carbon-containing Film

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Jacob, W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Voitsenya, V. S., Masuzaki, S., Motojima, O., Sagara, A., & Jacob, W. (2006). Impact of N ₂ +H ₂ Mixture Plasma on Carbon-containing Film. Problems of Atomic Science and Technology, 6, 141-143.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-109B-B

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