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  Transport and structural modification during nitrogen implantation of hard amorphous carbon films

Grigull, S., Jacob, W., Henke, D., Spaeth, C., Summchen, L., & Sigle, W. (1998). Transport and structural modification during nitrogen implantation of hard amorphous carbon films. Journal of Applied Physics, 83(10), 5185-5194. doi:10.1063/1.367338.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8868-4 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8869-2
Genre: Journal Article

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 Creators:
Grigull, S.1, Author           
Jacob, W.2, Author           
Henke, D.3, Author
Spaeth, C.3, Author
Summchen, L.3, Author
Sigle, W.3, Author
Affiliations:
1External Organizations, ou_persistent22              
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              
3Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf e.V., 01314 Dresden, Germany; Institut für Physik, Technische Universität Chemnitz-Zwickau, 09107 Chemnitz, Germany; Institut für Analytische Chemie, Technische Universität Dresden, 01062 Dresden, Germany; Max-Planck-Institut für Metallforschung, 70569 Stuttgart, Germany, ou_persistent22              

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Language(s): eng - English
 Dates: 1998
 Publication Status: Issued
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 627821
DOI: 10.1063/1.367338
URI: http://dx.doi.org/10.1063/1.367338
 Degree: -

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Title: Journal of Applied Physics
Source Genre: Journal
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Publ. Info: -
Pages: - Volume / Issue: 83 (10) Sequence Number: - Start / End Page: 5185 - 5194 Identifier: -